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Artigo Científico | Vidros | Inglês | 10/07/2008
Autores: Marina Sparvoli, Ronaldo D. Mansano
Palavras-chave: diamond like carbon, diffractive optical elements, glass
Resumo: We developed a complex (amplitude and phase) modulation Diffractive Optical Element (DOE) with four phase levels, which is based in a glass substrate coated with DLC (Diamond Like Carbon) thin film as the amplitude modulator. The DLC film was deposited by magnetron reactive sputtering with a graphite target and methane gas in an optical glass surface. The glass and DLC film roughness were measured using non destructive methods, such as a high step meter, Atomic Force Microscopy and Diffuse Reflectance. Other properties, such as refractive index of both materials were measured. The DOEs were tested using 632.8 nm HeNe laser.
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